Controllers, Controls and Software

Semiconductor Toolkit

The Moog Semiconductor Toolkit™ is a unique and powerful configurable software environment for EFEM and wafer handling integration and control. Its foremost virtue is that it eliminates the need for costly and time consuming software programming.

The Semiconductor Toolkit provides wafer-handling software utilities that run with Moog’s standard motion-and-machine control products. This product brings configurable, modular, parametric code to the user.

Autocalibration, wafer mapping, robot health checks and more can be configured in minutes, while the toolkit configures the code. This feature virtually eliminates the need for user programming and brings patented features such as Autocalibration technology to the user in an easy to configure utility toolkit.

Key Features 

Host Comm and Interpretation
Semiconductor Toolkit’s agile command interpretation and emulation capabilities make robot and other EFEM hardware changes completely transparent to the host. Toolkit™ seamlessly interprets and emulates the host command protocol.

Previously closed system architectures are opened up. It is practical to host connect one brand of robot via another brand’s command protocol. This capability significantly eases a change of robot vendors, and support of multiple vendors’ robots—to meet your business needs, or customers’ demands.

Advanced Path Planning
Wafer path planning is intended to extract maximum system throughput by moving wafers along the shortest possible paths—safely.

The Moog Semiconductor Toolkit™ implements an advanced, patented, path planning system that substantially improves on prior approaches. Wafers are transferred faster, smoother, and with significantly reduced risk of wafer slippage or damage.

Toolkit’s advanced path planning employs a complex numerical method for calculating a path of wafer travel that controls wafer acceleration and jerk and delivers the maximum safe speed of wafer movement from a first point to a second point. Wafer throughput is improved—risk of damage reduced.

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