Robots for Semiconductor Wafer Handling

Robots for Semiconductor Wafer Handling

Vacuum and Atmospheric Robots are a key part of the Moog wafer handling solution for the semiconductor market. Today’s wafer handling manufacturers demand world-class throughput, maintainability and reliability. Moog wafer handling robots meet those needs with a robust and simple design. Additionally, the flexible architecture of the Moog robots facilitates easy configuration to enable matching application specific needs.

Atmospheric Robots

Moog wafer handling atmospheric robots meet world-class throughput, maintainability and reliability with an innovative all-in-one design that provides excellent structural rigidity and integrates the motion control, power amplifier and power supply for superior real-time motion control. No external control or power unit is needed.

The ATM 600 Series robot handles wafers up to 450 mm (17.7 in) with maximum precision and reliability. Brushless DC servo motors, coupled with direct-drive Harmonic Drive® gears, ensure extremely high reaction capability and precise, trouble-free arm movements. The result is a smooth running and highly reliable robot with a demonstrated mean cycle between failures of > 50,000 operating hours.

Coupled with the advanced capabilities of the Moog BX-300 controller, this robot delivers a whole new level of performance for your wafer handling systems.

Vacuum Robots

Moog wafer handling vacuum robots meet the market needs for a reliable, flexible vacuum robot with its V4 and V2 series robots. These robots handle wafers up to 300 mm (11.8 in) with high precision and reliability. Brushless DC servo motors and absolute encoders, coupled with direct-drive Harmonic Drive® gears, ensure extremely high reaction capability and precise, trouble-free arm movements. The result is a fast and highly reliable robot with a demonstrated mean cycle between failures of > 50,000 operating hours.

The sophisticated capabilities of Moog’s BX-300 controller enables these robots to deliver a world class wafer handling system.