Semiconductor
Enabling greater precision, productivity, and reliability for semiconductor equipment manufacturers.
The semiconductor industry depends on equipment capable of operating at nanometer-level accuracy, minimal vibration, and exceptional reliability. As wafer sizes increase and manufacturing processes become more complex, OEMs require solutions that support:
- Precise motion control
- Cleanroom operation
- High signal integrity
- Continuous 24/7 operation
Moog provides integrated motion, rotary transfer, and fluid control technologies that help equipment builders overcome these challenges. From wafer handling to CMP equipment, deposition tools, inspection, and lithography support systems, our solutions are engineered to deliver the precision, durability, and performance needed to support next-generation semiconductor manufacturing.
Proven, Effective Solutions for Semiconductor Applications
Wafer Handling & Transfer
Semiconductor manufacturers face the challenge of moving delicate 300mm wafers with micron-level precision while maintaining productivity and minimizing contamination.
Our integrated motion control, rotary transmission, and precision automation technologies provide the accuracy for wafer storage, transfer, and positioning throughout the manufacturing process.
Chemical Mechanical Polishing
As semiconductor devices become more complex, CMP systems must deliver uniform polishing performance without compromising reliability.
Our rotary transmission technologies support the seamless transfer of power, fluids, and data in rotating equipment, helping manufacturers improve process consistency, increase uptime, and reduce maintenance requirements.
Precision & Vibration Control
As semiconductor manufacturing pushes the limits of precision, even the smallest vibrations can affect process performance and yeild in lithography, inspection, and exposure systems.
Our pneumatic servo-valve technologies provide ultra-precise closed-loop control for vibration-sensitive semiconductor processes.
Deposition & Process Equipment
As semiconductor processes become more advanced, rotating equipment must operate seamlessly without compromising cleanroom performance.
Our slip ring technologies deliver dependable power and signal transmission, helping manufacturers improve uptime and support consistent process performance.
Precise, Reliable Products for Semiconductor Manufacturing
Integrated Servo Motors
Moog SmartMotor™ systems combine the motor, drive, controller, and communications into a single compact package, making them ideal for semiconductor wafer storage, transfer, and handling equipment. Designed for high-speed, high-precision motion, SmartMotors help OEMs achieve excellent positioning accuracy, fast settling times, and smooth operation while maximizing productivity in demanding 24/7 manufacturing environments.
Industrial Slip Rings
Moog's slip rings provide dependable transmission of power, signals, and communication within rotating equipment operating in cleanroom environments. Engineered for long service life and signal integrity, these solutions support critical semiconductor processes where uptime and contamination control are essential.
Combination Rotary Solutions
Moog's integrated rotary solutions combine rotary unions, slip rings, and precision bearing technologies to support critical semiconductor processes such as CMP, wafer handling, and ion implantation. Engineered for vacuum and cleanroom environments, these systems deliver reliable power, signal, and fluid transfer while helping OEMs simplify machine designs, reduce maintenance requirements, and maximize equipment uptime.
Pneumatic Servo Valves
Moog pneumatic servo valves provide highly accurate closed-loop control for vibration isolation, lithography, inspection, and other precision semiconductor applications. Their advanced servo-valve architecture enables exceptional responsiveness and repeatability, helping manufacturers achieve the stability required for nanometer-scale production processes.
Read More About What We Offer
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Semiconductor Rotary Solution Flyer