Semiconductor
Delivering Trusted High-Performance Semiconductor Solutions
Engineered for precision, our motion control solutions meet the semiconductor industry's exacting standards.
The semiconductor industry demands precision, reliability, and high‑performance technology to drive innovation and efficiency. Moog’s advanced motion control solutions enable the production of high‑quality semiconductor products through fully integrated systems with a small footprint, high power density, and simple design—optimizing processes, reducing costs, and improving productivity. With technically mature sealing systems, we ensure ultimate accuracy in transmitting rotary motion into a vacuum, meeting the rigorous requirements of semiconductor and wafer production.
Semiconductor Solutions
Intelligent Motion for Semiconductor Robotics
Optimized Servo Control for Wafer Handling in Ultra-clean Environments.
What makes our SmartMotor™ by far the most powerful integrated motor in the industry is its unique ability to control an entire machine. The SmartMotor is not just a motor; it is a complete motion control system and the result of an innovative design philosophy. The unsurpassed programming ease, networking capability, highly flexible and expandable I/O, as well as the high power density servo performance is exactly what you should expect from the pioneer and recognized global leader of truly integrated motion control.
Reliable Signals and Rotary Solutions for Semiconductors
Our advanced Rotary Unions, Slip Rings, Combinations, and Air Bearings are engineered to meet the rigorous demands of wafer and conductor board production. With technically mature sealing systems, we ensure seamless transmission of rotary motion into vacuum environments—critical for high-performance semiconductor manufacturing. In chemical-mechanical polishing (CMP), one of the most vital steps in producing hard disks and LED wafers, our equipment guarantees consistent polishing results, safe wafer handling, and precise conditioning of polishing pads post-planarization.