Model 266 Hybrid FRU/ESR
HYBRID FLUID ROTARY UNION / ELECTRICAL SLIP RING

The Model 266 fluid rotary union effectively combines a compact electrical slip ring with a single vacuum pass. It offers the flexibility of electrical and vacuum transfer through a single rotational joint. The 266 is a low cost solution for semiconductor rotary joint applications.
Features
- Combined compact electrical slip ring with a single vacuum pass
- 0.235 inch port size
- Standard four electrical passes rated at 0.25 A
- Rotational speeds up to 180 rpm (19 rad/s)
- Transfers both analog and digital signals
- RJ22 connector
Benefits
- Continuous 360° rotation
- Meets semiconductor clean room standards
- Unique signal handling technology with minimal electrical circuit noise
Specifications | |
---|---|
Number of Ports |
1X vacuum 0.235 inch [5.97 mm] 4X electrical rated 30 V / 0.25 A |
Maximum Intermittent Speed |
90 rpm, ≥ 12 in-lb without vacuum, ≤ 24 in-lb with 24 inch Hg vacuum applied |
Pressure1 | Vacuum |
Operating Temperature1 |
-5°C to +55°C [23°F to +131°F] |
Maximum Torque (Estimated)2 |
36 in-lb [4.1 Nm] |
Weight | 0.6 lb [0.3 kg] |
Contact Us
Technical Support
Telephone: +1-902-468-2263
Typical Applications
- Semiconductor pick and place robot application
- Robot wrist
- Clean room robotics
- Packaging equipment
- Automated handling